Limits to ion beam etching of Mo/Si multilayer coatings

1992

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Publisher	Optical Society of America
Citation APA-ALL APA Style APA-ALL Style AAA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Schlatmann, R., Lu, C., Verhoeven, J., Puik, E. J.& van der Wiel, M. J. (1992, January). Limits to ion beam etching of Mo/Si multilayer coatings. Physics of X-ray Multilayer Structures, March 2-5, 1992, Jackson Hole Wyoming, Addendum and Postdeadline Papers.

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