Additional Metadata
Journal Nucl. Instrum. Methods Phys. Res. B
Citation
Schreutelkamp, R, Custer, J. S, Liefting, J. R, Saris, F.W, Lu, W. X, Zhang, B. -X, & Wang, Z. L. (1992). Pre-amorphization damage in Si(100) implanted with high mass MeV ions. Nucl. Instrum. Methods Phys. Res. B, 62, 372–376.