Nucl. Instrum. Methods Phys. Res. B

Schreutelkamp, R, Custer, J.S, Liefting, J.R, Saris, F.W, Lu, W.X, Zhang, B.-X, & Wang, Z.L. (1992). Pre-amorphization damage in Si(100) implanted with high mass MeV ions. Nucl. Instrum. Methods Phys. Res., Sect B, 62, 372–376.