Pre-amorphization damage in Si(100) implanted with high mass MeV ions

1992

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Journal	Nucl. Instrum. Methods Phys. Res. B
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Schreutelkamp, R., Custer, J. S., Liefting, J. R., Saris, F. W., Lu, W. X., Zhang, B.-X., & Wang, Z. L. (1992). Pre-amorphization damage in Si(100) implanted with high mass MeV ions. Nucl. Instrum. Methods Phys. Res., Sect B, 62, 372–376.

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