Additional Metadata
Publisher Materials Research Society
Editor G. S. Was , L. E. Rehn , D. M. Follstaedt
Citation
Liefting, J. R, Raineri, V, Schreutelkamp, R, Custer, J. S, & Saris, F.W. (1992). Avoiding dislocation formation for B, P. and As implants in silicon. In G. S Was, L. E Rehn, & D. M Follstaedt (Eds.), Phase Formation and Modification by Beam-Solid Interactions : Symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A. (pp. 173–178). Materials Research Society.