Additional Metadata
Journal Microelectron. Eng.
Citation
Saris, F.W, Custer, J. S, Schreutelkamp, R, Liefting, R. J, Wijburg, R. C. M, & Wallinga, H. (1992). Avoiding dislocations in ion-implanted silicon. Microelectron. Eng., 19, 357–362.