1992
Avoiding dislocations in ion-implanted silicon
Publication
Publication
Microelectron. Eng. , Volume 19 p. 357- 362
Additional Metadata | |
---|---|
Microelectron. Eng. | |
Saris, F.W, Custer, J. S, Schreutelkamp, R, Liefting, R. J, Wijburg, R. C. M, & Wallinga, H. (1992). Avoiding dislocations in ion-implanted silicon. Microelectron. Eng., 19, 357–362.
|