Additional Metadata
Publisher Kluwer
Editor S. Coffa , F. Priolo , E. Rimini , J. M. Poate
Citation
Saris, F.W. (1992). Surface science and semiconductor processing. In S Coffa, F Priolo, E Rimini, & J. M Poate (Eds.), Crucial Issues in Semiconductor Materials and Processing Technologies : Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, 1-13 July 1991 (pp. 147–152). Kluwer.