Additional Metadata
Publisher Materials Research Society
Editor G.S. Was , L.E. Rehn , D.M. Follstaedt
Citation
Cullis, A.G, Jacobson, D.C, Polman, A, Smith, P.W, Poate, J.M, & Whitehouse, C.R. (1992). The energy dependence of ion damage in AlxGa1-xAs/GaAs heterostructures and the effects of implanted impurity. In G.S Was, L.E Rehn, & D.M Follstaedt (Eds.), Phase Formation and Modification by Beam-Solid Interactions : Symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A. (pp. 229–234). Materials Research Society.