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A.J.P. van Maaren and W.C. Sinke (Wim)

1993-01-01

Tungsten deposition on GaAs using WF6 and atomic hydrogen

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J. Appl. Phys. , Volume 73 p. 1989- 1992

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Journal J. Appl. Phys.
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van Maaren, A.J.P, & Sinke, W.C. (1993). Tungsten deposition on GaAs using WF6 and atomic hydrogen. J. Appl. Phys., 73, 1989–1992.

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