1993-01-01
Tungsten deposition on GaAs using WF6 and atomic hydrogen
Publication
Publication
J. Appl. Phys.
,
Volume 73
p. 1989-
1992
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Journal | J. Appl. Phys. |
Citation |
van Maaren, A.J.P, & Sinke, W.C. (1993). Tungsten deposition on GaAs using WF6 and atomic hydrogen. J. Appl. Phys., 73, 1989–1992.
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