Additional Metadata
Publisher Materials Research Society
Editor E. A. Schiff , M. J. Thompson , A. Madan , K. Tanaka , P. G. Lecomber
Citation
Berntsen, A, Stolk, P. A, van der Weg, W. F, & Saris, F.W. (1993). Annealing of ion-implanted hydrogenated amorphous silicon: Stable and removable damage. In E. A Schiff, M. J Thompson, A Madan, K Tanaka, & P. G Lecomber (Eds.), Amorphous Silicon Technology-1993 : Symposium held April 13-16, 1993, San Francisco, California, U.S.A. (pp. 303–308). Materials Research Society.