Materials Research Society
E.A. Schiff , M.J. Thompson , A. Madan , K. Tanaka , P.G. Lecomber

Berntsen, A., Stolk, P. A., van der Weg, W. F., & Saris, F. W. (1993). Annealing of ion-implanted hydrogenated amorphous silicon: Stable and removable damage. In E. A. Schiff, M. J. Thompson, A. Madan, K. Tanaka, & P. G. Lecomber (Eds.), Amorphous Silicon Technology-1993 : Symposium held April 13-16, 1993, San Francisco, California, U.S.A. (pp. 303–308).