In this paper we demonstrate for the Mo/Si system that ion beam intermixing can be applied to obtain a graded refractive index (or density) within each period and sharp interfaces between the periods. We also performed reflectivity calculations to show the practical applicability of these multilayer systems.

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Publisher Optical Society of America
Schlatmann, R, Keppel, A, Bultman, S, & Verhoeven, J. (1994). Gradient index multilayers for X-ray reflection. In Physics of X-ray Multilayer Structures : Summaries of Papers Presented at the Physics of X-ray Multilayer Structures Topical Meeting, March 14-17, 1994, Jackson Hole, Wyoming : Conference Edition (pp. 170–173). Optical Society of America.