In this paper we demonstrate for the Mo/Si system that ion beam intermixing can be applied to obtain a graded refractive index (or density) within each period and sharp interfaces between the periods. We also performed reflectivity calculations to show the practical applicability of these multilayer systems.

Optical Society of America

Schlatmann, R., Keppel, A., Bultman, S., & Verhoeven, J. (1994). Gradient index multilayers for X-ray reflection. In Physics of X-ray Multilayer Structures : Summaries of Papers Presented at the Physics of X-ray Multilayer Structures Topical Meeting, March 14-17, 1994, Jackson Hole, Wyoming : Conference Edition (pp. 170–173).