The influence of noble gas ion bombardment during or after deposition, on the properties of metallic thin film is reviewed. This includes adhesion to the substrate and modification of the thin film surface.

Additional Metadata
Publisher Metallurgical Industry Press
Editor Y. Kuo
Citation
Verhoeven, J. (1990). Application of ion bombardment in the modification of metal thin films, a review. In Y Kuo (Ed.), Proceedings of the Tenth International Conference on Vacuum Metallurgy ; vol. 2: Metallurgical Coatings (pp. 35–40). Metallurgical Industry Press.