Ion beam synthesis of planar opto-electronic devices
Photonic technology requires the modification and synthesis of new materials and devices for the generation, guiding, switching, multiplexing and amplification of light. This paper reviews how some of these devices may be made using ion beam synthesis. Special attention is paid to the fabrication of erbium-doped optical waveguides.
|Journal||Nucl. Instrum. Methods Phys. Res. B|
Polman, A, Snoeks, E, van den Hoven, G.N, Brongersma, M.L, Serna, R, Shin, J.H, … Radius, E. (1995). Ion beam synthesis of planar opto-electronic devices. Nucl. Instrum. Methods Phys. Res. B, 106, 393–399.