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Additional Metadata
Persistent URL dx.doi.org/10.1063/1.1737480
Journal Appl. Phys. Lett.
Citation
van Dillen, T, de Dood, M.J.A, Penninkhof, J.J, Polman, A, Roorda, S, & Vredenberg, A.J. (2004). Ion beam-induced anisotropic plastic deformation of silicon microstructures. Appl. Phys. Lett., 84, 3591–3593. doi:10.1063/1.1737480